JPS6279719U - - Google Patents

Info

Publication number
JPS6279719U
JPS6279719U JP17122485U JP17122485U JPS6279719U JP S6279719 U JPS6279719 U JP S6279719U JP 17122485 U JP17122485 U JP 17122485U JP 17122485 U JP17122485 U JP 17122485U JP S6279719 U JPS6279719 U JP S6279719U
Authority
JP
Japan
Prior art keywords
screw blade
ribbon screw
drive shaft
large diameter
connection point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17122485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17122485U priority Critical patent/JPS6279719U/ja
Publication of JPS6279719U publication Critical patent/JPS6279719U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Screw Conveyors (AREA)
JP17122485U 1985-11-06 1985-11-06 Pending JPS6279719U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17122485U JPS6279719U (en]) 1985-11-06 1985-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17122485U JPS6279719U (en]) 1985-11-06 1985-11-06

Publications (1)

Publication Number Publication Date
JPS6279719U true JPS6279719U (en]) 1987-05-21

Family

ID=31106657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17122485U Pending JPS6279719U (en]) 1985-11-06 1985-11-06

Country Status (1)

Country Link
JP (1) JPS6279719U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240142788A (ko) 2023-03-22 2024-10-02 한국전자기술연구원 그래파이트-금속탄화물 복합막을 포함하는 극자외선 리소그래피용 펠리클

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240142788A (ko) 2023-03-22 2024-10-02 한국전자기술연구원 그래파이트-금속탄화물 복합막을 포함하는 극자외선 리소그래피용 펠리클

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